Test grating TGQ1 is intended for:

• simultaneous calibration in X, Y and Z directions;
• lateral calibration of SPM scanners;
• detection of lateral non-linearity, hysteresis, creep and cross-coupling effects.

Grating description
Structure	- Si wafer - the grating is formed on the layer of SiO2
Pattern types	3-Dimensional array of small rectangles
Period	3.0±0,05 µm
Height	19,5nm ±1,5 nm
Rectangles side size:	1,5±0,25 µm
Chip size	5x5x0,5 mm
Effective area	central square 3x3 mm

Fig.1 SPM image of TGQ1 grating