|
 |
 Back
TGZ1
Calibration grating TGZ1 is intended for Z-axis calibration of scanning probe microscopes and nonlinearity measurements.
|
Grating description |
|
Structure: |
- Si wafer
- the grating is formed on the layer of SiO2 |
|
Pattern types: |
1- Dimensional (in Z-axis direction) |
|
Step height: |
TGZ1 - 18,5±1nm |
|
Period: |
3±0,05µm |
|
Chip size: |
5x5x0,5mm |
|
Effective area: |
central square 3x3mm |
Fig.1 SEM photo of grating TGZ series
Copyright © 1998 - 2008, NT-MDT. All rights reserved.
|
|
|
|
