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TGS1
Calibration grating set TGS1 is intended for Z-axis calibration of scanning probe microscopes and nonlinearity measurements.
Grating set contains 3 grating TGZ1, TGZ2, TGZ3 with different step heights.
| Grating description |
| Structure: |
- Si wafer
- the grating is formed on the layer of SiO2 |
| Pattern types: |
1- Dimensional (in Z-axis direction) |
| Step height: |
TGZ1 - 18,5±1nm
TGZ2 - 108,5±2nm
TGZ3 - 535±4nm |
| Period: |
3±0,1µm |
| Chip size: |
5x5x0,5mm |
| Effective area: |
central square 3x3mm |
Fig.1 SEM photo of TGZ3 grating
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