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TDG01
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Diffraction Grating TDG01 |
Diffraction grating TDG01 is intended for submicron calibration scanning probe microscopes (SPM) in the X or Y direction.
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Grating description |
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Structure: |
- glass wafer
- the grating is formed on the layer of chalcagenid glass
- the grating top surface is aluminium |
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Pattern types: |
1- Dimensional (in the X or Y direction) |
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Pattern height: |
> 55 nm provides good image contrast |
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Geometry: |
parallel ridges |
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Period: |
278 nm (3600 periods/mm) |
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Accuracy: |
±1nm |
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Size: |
diameter 12,5 mm, thickness - 2,5 mm |
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Effective area: |
central diameter 9 mm. |
Fig.1 TDG01 grating
The image was obtained in the semi-contact mode on the microscopå SOLVER P47H (NT-MDT Co.)
Copyright © 1998 - 2008, NT-MDT. All rights reserved.
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