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HA_NC/15
HA_NC/15 - 15 chips of High Accuracy ETALON probes for noncontact/semicontact modes.
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High Accuracy NONCONTACT "ETALON" probes HA_NC series |
- Standard chip size: 1.6x3.6x0.45 mm.
- High reflective Au coating.
- Typical curvature radius of a tip: 10 nm.
- Total tip height : 9 - 16 µm.
- Each chip has two RECTANGULAR springs.
- Recommended for noncontact/semicontact modes.
- Packaged in GelPak® boxes.
GelPak® is a registered trade mark of Vichem Corporation.
| Specification for HA_NC probes |
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Chip thickness |
0.45mm |
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Reflective side |
Au |
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Spring number |
2 |
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Tip height h1 |
5-10 µm |
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Tip base height h2 |
4-6 µm |
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Ratio h1/h2 |
>1 |
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Tip aspect ratio |
5:1 |
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Cone angle ö |
<=22° |
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Curvature radius of a tip |
typical 10nm | |
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|
Cantilever series |
Spring |
Cantilever lenght, L±2µm |
Cantilever width, W±3µm |
Cantilever thickness, µm |
Resonant frequency, kHz |
Force constant, N/m |
|
min |
typical |
max |
Nominal |
Typical dispersion |
Nominal |
Typical dispersion |
|
HA_NC |
A |
87 |
32 |
1.7 |
1.75 |
1.8 |
200 |
±10% |
5.8 |
±20% |
|
B |
117 |
32 |
1.7 |
1.75 |
1.8 |
120 |
±10% |
3.4 |
±20% |
Advanced features:
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How is the resonance frequency
specified with such high accuracy?
Because the patented technology applied for cantilever manufacturing allows strict control of the lever thickness (±0.07 µm only!).
Moreover a special frequency stabilizer guarantees a high accuracy of the lever length (±2 µm). |
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Why is the tip aspect ratio so high?
Because the probe geometry allows to reduce significantly the tip basement diameter while maintaining the tip height.
In addition the tip itself is sharp - typical curvature radius is 10 nm.
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Why is the reflection so high?
Because the cantilever back-side is almost atomically smooth.
Roughness* is less than 2nm!
Reflection is further increased by Au coating.
*RMS on the area 20x20 µm as measured by AFM.
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The new High Accuracy "ETALON" probe series have polysilicon levers with silicon high resolution tips. Due to the technology used for lever manufacturing they have very reproducible parameters that leads to exact values for probe resonant frequency and force constant (typical dispersion ±10% / ±20%).
Moreover the new High Accuracy "ETALON" probes have low noise when operating in contact and noncontact AFM modes. It is possible due to the fact that the polysilicon material in the lever is softer than the silicon one usually used for probes production. Polysilicon levers have a shorter length compared to silicon probes at the same force constant value.
High Accuracy "ETALON" probes have high aspect ratio silicon tips (cone angle _22°) with a typical curvature radius of 10nm.
Comparison between polysilicon and silicon probes
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Comparative parameters |
Polysilicon |
Silicon |
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Thickness deviation |
± 0.07µm |
±0.3µm |
|
Roughness of reflective surface |
2nm |
20nm |
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Lever material |
Soft, flexible |
Fragile after dopping |
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Resonant frequency |
Typical dispersion ± 10% |
Till ±100% |
|
Force constant |
Typical dispersion ± 20% |
Till ±100% |
Unique color and NT-MDT logo on each cantilever chip
Copyright © 1998 - 2008, NT-MDT. All rights reserved.
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