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TDG01

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Diffraction Grating TDG01

 

 

Diffraction grating TDG01 is intended for submicron calibration scanning probe microscopes (SPM) in the X or Y direction.

Grating description

Structure:

- glass wafer
- the grating is formed on the layer of chalcagenid glass
- the grating top surface is aluminium

Pattern types:

1- Dimensional (in the X or Y direction)

Pattern height:

> 55 nm provides good image contrast

Geometry:

parallel ridges

Period:

278 nm (3600 periods/mm)

Accuracy:

±1nm

Size:

diameter 12,5 mm, thickness - 2,5 mm

Effective area:

central diameter 9 mm.

 

Fig.1 TDG01 grating

The image was obtained in the semi-contact mode on the microscopŠµ SOLVER P47H (NT-MDT Spectrum Instruments)

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