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TGX1

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Test Grating TGX1

 

Test grating TGX1 is intended for:

*                      lateral calibration of SPM scanners;

*                      detection of lateral non-linearity, hysteresis, creep, and cross-coupling effects;

*                      determination of the tip aspect ratio.

 

Grating description

Structure

the grating is formed on Si wafer top surface

Pattern types

chessboard-like array of square pillars with sharp undercut edges

Period

3±0,05µm

Edge curvature radius

less than 10nm

Chip size

5x5x0,5mm

Effective area

central square 3x3mm

Height

0,6µm*

* - the dimensions marked * are given for information only.



Fig.1 SPM image of TGX1 grating

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