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TGG1

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Test Grating TGG1

 

Test grating TGG1 is intended for:
- SPM calibration in X or Y axis;
- detection of lateral and vertical scanner nonlinearity;
- detection of angular distortion;
- tip characterization.

 

Grating description

Structure:

the grating is formed on Si wafer top surface

Pattern types:

1- D array of triangular steps (in X or Y direction) having precise linear and angular sizes

Edge angle:

70 degrees

Edge radius:

≤10nm

Period:

3±0,05µm

Chip size:

5x5x0,5mm

Effective area:

central square 3x3mm


Fig.1 SPM image of TGG1 grating

 

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