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TGS1

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Grating set TGS1

Calibration grating set TGS1 is intended for Z-axis calibration of scanning probe microscopes and nonlinearity measurements.

Grating set contains 3 gratings TGZ1, TGZ2, TGZ3 with different step heights.

 

Grating description
Structure: - Si wafer
- the grating is formed on the layer of SiO2
Pattern types: 1- Dimensional (in Z-axis direction)
Step height: TGZ1 - 20,0±1.5 nm*
TGZ2 - 110±2 nm*
TGZ3 - 520±3 nm*
Period: 3±0,1 µm
Chip size: 5x5x0,5 mm
Effective area: central square 3x3 mm

 

Fig.1 SEM photo of TGZ3 grating

* - the average meaning based on the measurements of 5 gratings with the same height (from the batch of 300 gratings) by AFM calibrated by PTB certified grating set TGS1. Basic step height can vary from the specified one within ±10 % depending on the batch (for example TGZ1 grating can have step height 22±1.5 nm)

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