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TGT1

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Image courtesy Dr.John Mamin, IBM Research Division

 

 

Test Grating TGT1

 

Test grating TGT1 is intended for:
- for 3-D visualization of the scanning tip;
- determination of tip sharpness parameters (aspect ratio and curvature radius), tip degradation and contamination control.

 

Grating description

Structure:

the grating is formed on Si wafer top surface

Pattern types:

array of sharp tips

Tip angle:

50±10 degrees (on the very tip end)

Tip curvature radius:

≤10nm

Period:

3±0,05µm

Diagonal period:

2,12µm

Chip size:

5x5x0,5mm

Effective area:

central square 2x2mm

Height, h:

0,3-0,5µm

 

 

 

 


Fig.1 SEM images of TGT1 grating 
Images courtesy Dr.John Mamin,
IBM Research Division

 

 

 

 

 

 

 

 

 

 

 

 

 

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